Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more...
Dr.LiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications.
Selected research and development results are published in renowned journals such as JM3, at first class conferences, such as SPIE Advanced Lithography, BACUS, Photomask Japan, MNE, and at the international lithography simulation workshop which is organized by IISB. more...
Education and Jobs
Postdocs, PhD- and master students with background in the field of physics, computational or electrical engineering, mathematics, and chemistry are doing leading edge research and development in an international and multidisciplinary team. The participation of Fraunhofer IISB in the Erlangen Graduate School in Advanced Optical Technologies (SAOT), which has been established within the framework of the "Excellence Initiative by the German Federal and State Governments to Promote Science and Research at German Universities", provides extraordinary opportunities for PhD students and research work in the relevant field. more...